Micromachines, such as micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS), are beginning to affect almost every area of science and technology. In areas as diverse as the chemical, automotive, aeronautical, cellular, and optical (light-wave) communications industries, silicon-based micromachines are becoming the solution of choice for many problems. Devices such as optical switches, variable attenuators, active equalizers, add/drop multiplexers, optical cross-connects, gain tilt equalizers, and data transmitters are finding application in advanced light-wave systems.